- For 2"~12" wafer handling
SINGLE ARM AR-S300H For handling heavy substrate AR-S300W Water-proof AR-S300R Reversal-axis (翻面功能) DOUBLE ARM AR-W300H For handling heavy substrate AR-W300W Water-proof AR-W300COMPO Controller built-in robot AR-W300S With cassette mapper - 日本原廠依客戶需求可客制FORK,進而向下支援2" Wafer , 範圍可達2" ~ 12"
- 全系列Robot為伺服驅動器馬達,重覆精度可達±0.1mm
- 簡單易操控的人機介面教導器,迅速故障排除與Teaching取放點位
- 如需進一步的了解隨時歡迎您與我們詢問聯絡
永遠超越客戶的期待
ALWAYS GOES BEYOND CUSTOMERS' EXPECTATIONS